Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5
In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pure aluminum nitride (AlN) CMRs, our results...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 66(2019), 1 vom: 19. Jan., Seite 146-153
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| 1. Verfasser: |
Lozzi, Andrea
(VerfasserIn) |
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| Weitere Verfasser: |
Ting-Ta Yen, Ernest,
Muralt, Paul,
Villanueva, Luis Guillermo |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2019
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
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