Towards chemically neutral carbon cleaning processes : plasma cleaning of Ni, Rh and Al reflective optical coatings and thin Al filters for free-electron lasers and synchrotron beamline applications
The choice of a reflective optical coating or filter material has to be adapted to the intended field of application. This is mainly determined by the required photon energy range or by the required reflection angle. Among various materials, nickel and rhodium are common materials used as reflective...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 25(2018), Pt 6 vom: 01. Nov., Seite 1642-1649
|
|---|
| 1. Verfasser: |
Moreno Fernández, Harol
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Zangrando, Marco,
Sauthier, Guillaume,
Goñi, Alejandro R,
Carlino, Vincent,
Pellegrin, Eric |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2018
|
|---|
| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
|
|---|
| Schlagworte: | Journal Article
FEL and synchrotron radiation beamline optics
carbon contamination
free-electron lasers (FELs)
inductively coupled plasma
plasma cleaning chemistry |
|---|