Phase Noise Measurements of AlN Contour-Mode Resonators With Carrier Suppression Technique

In this paper, the phase noise of aluminum nitride (AlN) contour-mode resonators is investigated using a passive measurement system with carrier suppression. The purpose is to make careful measurements of the performance of AlN resonators in order to better understand and clarify previously reported...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 65(2018), 10 vom: 18. Okt., Seite 1943-1950
1. Verfasser: Vaillant, Etienne (VerfasserIn)
Weitere Verfasser: Sthal, Fabrice, Imbaud, Joel, Soumann, Valerie, Abbe, Philippe, Arapan, Lilia, Esnault, Francois-Xavier, Cibiel, Gilles, Segovia-Fernandez, Jeronimo, Piazza, Gianluca
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2018
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, Non-U.S. Gov't
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520 |a In this paper, the phase noise of aluminum nitride (AlN) contour-mode resonators is investigated using a passive measurement system with carrier suppression. The purpose is to make careful measurements of the performance of AlN resonators in order to better understand and clarify previously reported frequency instability in these devices. The resonant frequencies of the resonators are around 220 MHz. The motional parameters, the thermal behavior, and the nonlinear power effect of these resonators have been evaluated. Then, the principle of the noise measurement system is reviewed, and the resonator conditioning is shown. Finally, the noise measurements of the resonators are presented and discussed 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
700 1 |a Sthal, Fabrice  |e verfasserin  |4 aut 
700 1 |a Imbaud, Joel  |e verfasserin  |4 aut 
700 1 |a Soumann, Valerie  |e verfasserin  |4 aut 
700 1 |a Abbe, Philippe  |e verfasserin  |4 aut 
700 1 |a Arapan, Lilia  |e verfasserin  |4 aut 
700 1 |a Esnault, Francois-Xavier  |e verfasserin  |4 aut 
700 1 |a Cibiel, Gilles  |e verfasserin  |4 aut 
700 1 |a Segovia-Fernandez, Jeronimo  |e verfasserin  |4 aut 
700 1 |a Piazza, Gianluca  |e verfasserin  |4 aut 
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