Low-Temperature Variation of Acoustic Velocity in PDMS for High-Frequency Applications
Polydimethylsiloxane (PDMS) and other related silicon-based polymers are among the most widely employed elastomeric materials in microsystems, owing to their physical and chemical properties. Meanwhile, surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors and filters have been vastly exp...
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Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 65(2018), 5 vom: 07. Mai, Seite 862-869
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| 1. Verfasser: |
Streque, Jeremy
(VerfasserIn) |
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| Weitere Verfasser: |
Rouxel, Didier,
Talbi, Abdelkrim,
Thomassey, Matthieu,
Vincent, Brice |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2018
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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