High-Temperature SAW Resonator Sensors : Electrode Design Specifics

Surface acoustic wave (SAW) sensors are steadily paving the way to wider application areas. Their main benefit consisting in the possibility of wireless interrogation with the radio frequency interrogation signal being the only energy source for the reradiated signal. This feature is getting more an...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 65(2018), 4 vom: 03. Apr., Seite 657-664
1. Verfasser: Zhgoon, Sergei A (VerfasserIn)
Weitere Verfasser: Shvetsov, Alexander S, Sakharov, Sergei A, Elmazria, Omar
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2018
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, Non-U.S. Gov't
LEADER 01000naa a22002652 4500
001 NLM282595465
003 DE-627
005 20231225034303.0
007 cr uuu---uuuuu
008 231225s2018 xx |||||o 00| ||eng c
024 7 |a 10.1109/TUFFC.2018.2797093  |2 doi 
028 5 2 |a pubmed24n0941.xml 
035 |a (DE-627)NLM282595465 
035 |a (NLM)29610095 
040 |a DE-627  |b ger  |c DE-627  |e rakwb 
041 |a eng 
100 1 |a Zhgoon, Sergei A  |e verfasserin  |4 aut 
245 1 0 |a High-Temperature SAW Resonator Sensors  |b Electrode Design Specifics 
264 1 |c 2018 
336 |a Text  |b txt  |2 rdacontent 
337 |a ƒaComputermedien  |b c  |2 rdamedia 
338 |a ƒa Online-Ressource  |b cr  |2 rdacarrier 
500 |a Date Completed 01.03.2019 
500 |a Date Revised 01.03.2019 
500 |a published: Print 
500 |a Citation Status PubMed-not-MEDLINE 
520 |a Surface acoustic wave (SAW) sensors are steadily paving the way to wider application areas. Their main benefit consisting in the possibility of wireless interrogation with the radio frequency interrogation signal being the only energy source for the reradiated signal. This feature is getting more and more attractive with the growing demand in monitoring multiple industrial objects difficult to access by wired sensors in harsh environments. Among such wider applications, the possibility of making measurements of temperature, deformation, vibrations, and some other parameters at temperatures in the range of 300 °C-1000 °C look quite promising. This paper concentrates on specific features of the SAW resonator-based sensors operation at this temperature range. High-temperature influences the material choice and thus the properties of SAW resonators design peculiarities intended for use at high temperature. It is suggested that preferable designs should use synchronous resonators with relatively thick electrodes (10% of wavelength) based on Ir or Pt alloys while benefiting from the possibilities of specific designs that could reduce the negative impact of thick electrodes on the manufacturing in quantity. This solution benefits from lower resonance frequency scatter because of the automatic compensation of SAW velocity decrease due to electrode metallization ratio increase. This compensation originates from the resonance frequency increase that is related to the decrease of the Bragg bandwidth defined by the reflection. It is shown in modeling examples that the value of metallization ratio at which this compensation occurs is close to 65%-70% 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
700 1 |a Shvetsov, Alexander S  |e verfasserin  |4 aut 
700 1 |a Sakharov, Sergei A  |e verfasserin  |4 aut 
700 1 |a Elmazria, Omar  |e verfasserin  |4 aut 
773 0 8 |i Enthalten in  |t IEEE transactions on ultrasonics, ferroelectrics, and frequency control  |d 1986  |g 65(2018), 4 vom: 03. Apr., Seite 657-664  |w (DE-627)NLM098181017  |x 1525-8955  |7 nnns 
773 1 8 |g volume:65  |g year:2018  |g number:4  |g day:03  |g month:04  |g pages:657-664 
856 4 0 |u http://dx.doi.org/10.1109/TUFFC.2018.2797093  |3 Volltext 
912 |a GBV_USEFLAG_A 
912 |a SYSFLAG_A 
912 |a GBV_NLM 
912 |a GBV_ILN_22 
912 |a GBV_ILN_24 
912 |a GBV_ILN_350 
951 |a AR 
952 |d 65  |j 2018  |e 4  |b 03  |c 04  |h 657-664