Efficient high-order suppression system for a metrology beamline
High-quality metrology with synchrotron radiation requires in particular a very high spectral purity of the incident beam. This is usually achieved by a set of transmission filters with suitable absorption edges to suppress high-order radiation of the monochromator. The at-wavelength metrology stati...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 25(2018), Pt 1 vom: 01. Jan., Seite 100-107
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| 1. Verfasser: |
Sokolov, A
(VerfasserIn) |
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| Weitere Verfasser: |
Sertsu, M G,
Gaupp, A,
Lüttecke, M,
Schäfers, F |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2018
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
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| Schlagworte: | Journal Article
PGM beamline
XUV optical elements
at-wavelength metrology
diffraction gratings
higher orders
reflectometer |
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