Reflective Small Angle Electron Scattering to Characterize Nanostructures on Opaque Substrates

Features sizes in integrated circuits (ICs) are often at the scale of 10 nm and are ever shrinking. ICs appearing in today's computers and hand held devices are perhaps the most prominent examples. These smaller feature sizes demand equivalent advances in fast and accurate dimensional metrology...

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Bibliographische Detailangaben

Veröffentlicht in:	Applied physics letters. - 1998. - 111(2017), 12 vom: 14. Sept.
1. Verfasser:	Friedman, Lawrence H (VerfasserIn)
Weitere Verfasser:	Wu, Wen-Li, Fu, Wei-En, Chien, Yunsan
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2017
Zugriff auf das übergeordnete Werk:	Applied physics letters
Schlagworte:	Journal Article