Jeon, W., Cho, Y., Jo, S., Ahn, J., & Jeong, S. (2017). Wafer-Scale Synthesis of Reliable High-Mobility Molybdenum Disulfide Thin Films via Inhibitor-Utilizing Atomic Layer Deposition. Advanced materials (Deerfield Beach, Fla.), 29(47), . https://doi.org/10.1002/adma.201703031
Chicago ZitierstilJeon, Woojin, Yeonchoo Cho, Sanghyun Jo, Ji-Hoon Ahn, und Seong-Jun Jeong. "Wafer-Scale Synthesis of Reliable High-Mobility Molybdenum Disulfide Thin Films via Inhibitor-Utilizing Atomic Layer Deposition." Advanced Materials (Deerfield Beach, Fla.) 29, no. 47 (2017). https://dx.doi.org/10.1002/adma.201703031.
MLA ZitierstilJeon, Woojin, et al. "Wafer-Scale Synthesis of Reliable High-Mobility Molybdenum Disulfide Thin Films via Inhibitor-Utilizing Atomic Layer Deposition." Advanced Materials (Deerfield Beach, Fla.), vol. 29, no. 47, 2017.