Normal tracing deflectometry using a secondary light source
Scanning deflectometric profilers based on an f-θ system are typical optical tools used to measure mirror profiles at many synchrotron facilities. Unlike these profilers, which are based on a pencil beam, here a secondary light source and a pinhole are used to construct a system that automatically s...
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 24(2017), Pt 4 vom: 01. Juli, Seite 765-774 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2017
|
| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
| Schlagworte: | Journal Article Research Support, Non-U.S. Gov't aberration beam lateral motion deflectometric profiler inhomogeneity normal tracing method secondary light source |
| Online verfügbar |
Volltext |