A Study on the Effects of Release Area on the Quality Factor of Contour-Mode Resonators by Laser Doppler Vibrometry
Through the use of a laser Doppler vibrometer, it is shown that a 31% variation in quality factor can occur due to the effect of undercutting of the device layers outside of the anchors of a 220-MHz aluminum nitride contour-mode resonator. This undercutting is a result of the isotropic etch process...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 64(2017), 5 vom: 01. Mai, Seite 898-904
|
|---|
| 1. Verfasser: |
Gibson, Brian
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Qalandar, Kamala,
Cassella, Cristian,
Piazza, Gianluca,
Foster, Kimberly L |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2017
|
|---|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S. |
|---|