Improved environmental stability for plasma enhanced chemical vapor deposition SiO2 waveguides using buried channel designs

Ridge and buried channel waveguides (BCWs) made using plasma-enhanced chemical vapor deposition SiO2 were fabricated and tested after being subjected to long 85°C water baths. The water bath was used to investigate the effects of any water absorption in the ridge and BCWs. Optical mode spreading and...

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Bibliographische Detailangaben

Veröffentlicht in:	Optical engineering (Redondo Beach, Calif.). - 1986. - 55(2016), 4 vom: 06. Apr.
1. Verfasser:	Wall, Thomas A (VerfasserIn)
Weitere Verfasser:	Chu, Roger P, Parks, Joshua W, Ozcelik, Damla, Schmidt, Holger, Hawkins, Aaron R
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2016
Zugriff auf das übergeordnete Werk:	Optical engineering (Redondo Beach, Calif.)
Schlagworte:	Journal Article integrated waveguides plasma enhanced chemical vapor deposition silicon dioxide water absorption waveguide lifetime