Biasing of Capacitive Micromachined Ultrasonic Transducers
Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many l...
Ausführliche Beschreibung
Bibliographische Detailangaben
Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 64(2017), 2 vom: 15. Feb., Seite 402-413
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1. Verfasser: |
Caliano, Giosue
(VerfasserIn) |
Weitere Verfasser: |
Matrone, Giulia,
Savoia, Alessandro Stuart |
Format: | Online-Aufsatz
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Sprache: | English |
Veröffentlicht: |
2017
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Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |