Calibration of a compact XUV soft X-ray monochromator with a digital autocollimator in situ
A digital autocollimator of resolution 0.1 µrad (0.02 arcsec) serves as a handy correction tool for calibrating the angular uncertainty during angular and lateral movements of gratings inside a monochromator chamber under ultra-high vacuum. The photon energy dispersed from the extreme ultraviolet (X...
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 23(2016), Pt 5 vom: 01. Sept., Seite 1232-6 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2016
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
| Schlagworte: | Journal Article autocollimator diffraction gratings extreme ultraviolet (EUV) metrological instrumentation on-site beamline diagnistic soft X-rays |
| Online verfügbar |
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