New figuring model based on surface slope profile for grazing-incidence reflective optics
Surface slope profile is widely used in the metrology of grazing-incidence reflective optics instead of surface height profile. Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope. This means...
Description complète
Détails bibliographiques
| Publié dans: | Journal of synchrotron radiation. - 1994. - 23(2016), Pt 5 vom: 01. Sept., Seite 1087-90
|
|---|
| Auteur principal: |
Zhou, Lin
(Auteur) |
|---|
| Autres auteurs: |
Huang, Lei,
Bouet, Nathalie,
Kaznatcheev, Konstantine,
Vescovi, Matthew,
Dai, Yifan,
Li, Shengyi,
Idir, Mourad |
|---|
| Format: | Article en ligne
|
|---|
| Langue: | English |
|---|
| Publié: |
2016
|
|---|
| Accès à la collection: | Journal of synchrotron radiation
|
|---|
| Sujets: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S.
Research Support, Non-U.S. Gov't
ion beam figuring
one-dimensional
surface slope
synchrotron optics |
|---|