Effects of Aspect Ratio on Water Immersion into Deep Silica Nanoholes
Understanding the influence of aspect ratio on water immersion into silica nanoholes is of significant importance to the etching process of semiconductor fabrication and other water immersion-related physical and biological processes. In this work, the processes of water immersion into silica nanoho...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 32(2016), 34 vom: 30. Aug., Seite 8759-66
|
|---|
| 1. Verfasser: |
Zheng, Jing
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Zhang, Junqiao,
Tan, Lu,
Li, Debing,
Huang, Liangliang,
Wang, Qi,
Liu, Yingchun |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2016
|
|---|
| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
|
|---|
| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
|---|