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231224s2016 xx |||||o 00| ||eng c |
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|a 10.1107/S1600577515021621
|2 doi
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|a pubmed25n0852.xml
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|a (NLM)26698062
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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| 100 |
1 |
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|a Zhou, Lin
|e verfasserin
|4 aut
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| 245 |
1 |
0 |
|a One-dimensional ion-beam figuring for grazing-incidence reflective optics
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| 264 |
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1 |
|c 2016
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| 336 |
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
|b cr
|2 rdacarrier
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| 500 |
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|a Date Completed 20.04.2016
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|a Date Revised 24.12.2015
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick-Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. The surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics
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|a Journal Article
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| 650 |
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|a Research Support, Non-U.S. Gov't
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| 650 |
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|a Research Support, U.S. Gov't, Non-P.H.S.
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| 650 |
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|a ion beam figuring
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| 650 |
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|a one-dimensional
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| 650 |
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4 |
|a synchrotron optics
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| 700 |
1 |
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|a Idir, Mourad
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Bouet, Nathalie
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Kaznatcheev, Konstantine
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Huang, Lei
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Vescovi, Matthew
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Dai, Yifan
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Li, Shengyi
|e verfasserin
|4 aut
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| 773 |
0 |
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|i Enthalten in
|t Journal of synchrotron radiation
|d 1994
|g 23(2016), 1 vom: 25. Jan., Seite 182-6
|w (DE-627)NLM09824129X
|x 1600-5775
|7 nnns
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| 773 |
1 |
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|g volume:23
|g year:2016
|g number:1
|g day:25
|g month:01
|g pages:182-6
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| 856 |
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|u http://dx.doi.org/10.1107/S1600577515021621
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