Electrostatic Generation of Bulk Acoustic Waves and Electrical Parameters of Si-MEMS Resonators
This paper proposes an analytical approach to model the generation of bulk acoustic waves in an electrostatically excited silicon MEMS structure, as well as its electromechanical response in terms of static and dynamic displacements, electromechanical coupling, and motional current. The analysis per...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 63(2016), 2 vom: 15. Feb., Seite 313-25
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| 1. Verfasser: |
Dulmet, Bernard
(VerfasserIn) |
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| Weitere Verfasser: |
Ivan, Mihaela Eugenia,
Ballandras, Sylvain |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2016
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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