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231224s2016 xx |||||o 00| ||eng c |
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|a 10.1109/TUFFC.2015.2498968
|2 doi
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|a eng
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|a DeMiguel-Ramos, M
|e verfasserin
|4 aut
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|a Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors
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|c 2016
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|a Text
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|a ƒaComputermedien
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|a Date Completed 13.06.2017
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|a Date Revised 13.06.2017
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a Gravimetric sensors based on solidly mounted resonators require fully insulating acoustic reflectors to avoid parasitics when operating in liquid media. In this work, we propose a new high-acoustic impedance material, tungsten oxide ([Formula: see text]), for acoustic reflectors. We have optimized the sputtering conditions of [Formula: see text] to obtain nonconductive layers with mass density around [Formula: see text] and acoustic velocities for the shear and the longitudinal modes up to 2700 and 4500 m/s, respectively. Compared to other conventionally used high impedance layers, [Formula: see text] films display several manufacture advantages, such as high deposition rates, great reproducibility, and good adhesion to underlying substrates. We have demonstrated the applicability of [Formula: see text] in practical shear mode bulk acoustic wave resonators that display good performance in liquid environments
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|a Journal Article
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|a Diaz-Duran, Barbara
|e verfasserin
|4 aut
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|a Munir, Junaid
|e verfasserin
|4 aut
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| 700 |
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|a Clement, Marta
|e verfasserin
|4 aut
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|a Mirea, Teona
|e verfasserin
|4 aut
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1 |
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|a Olivares, Jimena
|e verfasserin
|4 aut
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|a Iborra, Enrique
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 63(2016), 7 vom: 15. Juli, Seite 938-44
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnns
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| 773 |
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|g volume:63
|g year:2016
|g number:7
|g day:15
|g month:07
|g pages:938-44
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|u http://dx.doi.org/10.1109/TUFFC.2015.2498968
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