Temperature coefficient of frequency modeling for CMOS-MEMS bulk mode composite resonators
CMOS-MEMS resonators, which are promising building blocks for achieving monolithic integration of MEMS structure, can be used for timing and filtering applications, and control circuitry. SiO2 has been used to make MEMS resonators with quality factor Q > 10(4), but temperature instability remains...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 62(2015), 6 vom: 14. Juni, Seite 1166-78
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| 1. Verfasser: |
Wang, Siping
(VerfasserIn) |
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| Weitere Verfasser: |
Chen, Wen-Chien,
Bahr, Bichoy,
Fang, Weileun,
Li, Sheng-Shian,
Weinstein, Dana |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2015
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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