APA Zitierstil

Yamaner, F. Y., Zhang, X., & Oralkan, Ö. (2015). A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 62(5), 972. https://doi.org/10.1109/TUFFC.2014.006794

Chicago Zitierstil

Yamaner, F Yalçın, Xiao Zhang, und Ömer Oralkan. "A Three-mask Process for Fabricating Vacuum-sealed Capacitive Micromachined Ultrasonic Transducers Using Anodic Bonding." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 62, no. 5 (2015): 972. https://dx.doi.org/10.1109/TUFFC.2014.006794.

MLA Zitierstil

Yamaner, F Yalçın, et al. "A Three-mask Process for Fabricating Vacuum-sealed Capacitive Micromachined Ultrasonic Transducers Using Anodic Bonding." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 62, no. 5, 2015, p. 972.