Downscaling at submicrometer scale of the gap width of interdigitated Ba0.5Sr0.5TiO3 capacitors
The goal of this work was to study the influence of shrinking the gap width between the fingers of interdigitated tunable capacitors (IDCs). Voltage control of the capacitance was achieved with a 500-nm-thick Ba0.5Sr0.5TiO3 film which is in paraelectric state at room temperature. Eight devices with...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 62(2015), 2 vom: 21. Feb., Seite 247-54
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| 1. Verfasser: |
Khalfallaoui, Abderrazek
(VerfasserIn) |
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| Weitere Verfasser: |
Burgnies, Ludovic,
Blary, Karine,
Velu, Gabriel,
Lippens, Didier,
Carru, Jean-Claude |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2015
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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