Developing a cost-effective nanolithography strategy that enables the production of subwavelength features with various shapes over large areas is a long-standing goal in the nanotechnology community. Herein, an inexpensive nanolithographic technique that combines the wafer-scale production capabili...
Bibliographische Detailangaben
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 31(2015), 3 vom: 27. Jan., Seite 1210-7
|
1. Verfasser: |
Wu, Jin
(VerfasserIn) |
Weitere Verfasser: |
Yu, Cheng-han,
Li, Shaozhou,
Zou, Binghua,
Liu, Yayuan,
Zhu, Xiaoqun,
Guo, Yuanyuan,
Xu, Hongbo,
Zhang, Weina,
Zhang, Liping,
Liu, Bin,
Tian, Danbi,
Huang, Wei,
Sheetz, Michael P,
Huo, Fengwei |
Format: | Online-Aufsatz
|
Sprache: | English |
Veröffentlicht: |
2015
|
Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
|
Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
Dimethylpolysiloxanes
Gold
7440-57-5
Polymethyl Methacrylate
9011-14-7 |