Direct nano-scale patterning of Ag films using hard X-ray induced oxidation

The morphological change of silver nano-particles (AgNPs) exposed to an intense synchrotron X-ray beam was investigated for the purpose of direct nano-scale patterning of metal thin films. AgNPs irradiated by hard X-rays in oxygen ambient were oxidized and migrated out of the illuminated region. The...

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Bibliographische Detailangaben

Veröffentlicht in:	Journal of synchrotron radiation. - 1994. - 22(2015), 1 vom: 21. Jan., Seite 156-60
1. Verfasser:	Kim, Jae Myung (VerfasserIn)
Weitere Verfasser:	Lee, Su Yong, Kang, Hyon Chol, Noh, Do Young
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2015
Zugriff auf das übergeordnete Werk:	Journal of synchrotron radiation
Schlagworte:	Journal Article Research Support, Non-U.S. Gov't Fresnel zone plate X-ray lithography hard X-ray focusing