The thin film formation of magnetron sputtered polycrystalline coatings was monitored by in situ X-ray reflectivity measurements. The measured intensity was analyzed using the Parratt algorithm for time-dependent thin film systems. Guidelines for the on-line interpretation of the data were developed...
Détails bibliographiques
| Publié dans: | Journal of synchrotron radiation. - 1994. - 22(2015), 1 vom: 21. Jan., Seite 76-85
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| Auteur principal: |
Kaufholz, Marthe
(Auteur) |
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| Autres auteurs: |
Krause, Bärbel,
Kotapati, Sunil,
Köhl, Martin,
Mantilla, Miguel F,
Stüber, Michael,
Ulrich, Sven,
Schneider, Reinhard,
Gerthsen, Dagmar,
Baumbach, Tilo |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2015
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| Accès à la collection: | Journal of synchrotron radiation
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| Sujets: | Journal Article
Research Support, Non-U.S. Gov't
composite
in situ X-ray reflectivity
sputter deposition |
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