The thin film formation of magnetron sputtered polycrystalline coatings was monitored by in situ X-ray reflectivity measurements. The measured intensity was analyzed using the Parratt algorithm for time-dependent thin film systems. Guidelines for the on-line interpretation of the data were developed...
Bibliographische Detailangaben
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 22(2015), 1 vom: 10. Jan., Seite 76-85
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| 1. Verfasser: |
Kaufholz, Marthe
(VerfasserIn) |
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| Weitere Verfasser: |
Krause, Bärbel,
Kotapati, Sunil,
Köhl, Martin,
Mantilla, Miguel F,
Stüber, Michael,
Ulrich, Sven,
Schneider, Reinhard,
Gerthsen, Dagmar,
Baumbach, Tilo |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2015
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
composite
in situ X-ray reflectivity
sputter deposition |
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