An analytical solution for curved piezoelectric micromachined ultrasonic transducers with spherically shaped diaphragms
An analytical solution for piezoelectrically actuated spherically shaped diaphragms has been developed to study their dynamic behavior with targeted applications in piezoelectric micromachined ultrasonic transducers (pMUT). The analytical model starts with a curved pMUT composed of a piezoelectric d...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 61(2014), 9 vom: 27. Sept., Seite 1533-44
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| Auteur principal: |
Sammoura, Firas
(Auteur) |
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| Autres auteurs: |
Akhbari, Sina,
Lin, Liwei |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2014
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article
Research Support, Non-U.S. Gov't |
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