Element specific monolayer depth profiling
© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Veröffentlicht in: | Advanced materials (Deerfield Beach, Fla.). - 1998. - 26(2014), 38 vom: 08. Okt., Seite 6554-9 |
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1. Verfasser: | |
Weitere Verfasser: | , , , , , , , , , , , , , , , , , , , , |
Format: | Online-Aufsatz |
Sprache: | English |
Veröffentlicht: |
2014
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Zugriff auf das übergeordnete Werk: | Advanced materials (Deerfield Beach, Fla.) |
Schlagworte: | Journal Article Research Support, Non-U.S. Gov't Research Support, U.S. Gov't, Non-P.H.S. complex functional materials depth profiling non-destructive characterization resonant X-ray reflectivity thin film heterostructures |
Zusammenfassung: | © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. The electronic phase behavior and functionality of interfaces and surfaces in complex materials are strongly correlated to chemical composition profiles, stoichiometry and intermixing. Here a novel analysis scheme for resonant X-ray reflectivity maps is introduced to determine such profiles, which is element specific and non-destructive, and which exhibits atomic-layer resolution and a probing depth of hundreds of nanometers |
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Beschreibung: | Date Completed 23.06.2015 Date Revised 30.09.2020 published: Print-Electronic Citation Status MEDLINE |
ISSN: | 1521-4095 |
DOI: | 10.1002/adma.201402028 |