A comparison between conventional and collapse-mode capacitive micromachined ultrasonic transducers in 10-MHz 1-D arrays
This paper presents a comprehensive comparison between a collapse-mode and a conventional-mode capacitive micromachined ultrasonic transducer (CMUT); both devices have a 1-μm-thick silicon plate and operate at 10 MHz when biased at 100 V. The radii of the circular plates and the gap heights are modi...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 6 vom: 15. Juni, Seite 1245-55
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| 1. Verfasser: |
Park, Kwan Kyu
(VerfasserIn) |
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| Weitere Verfasser: |
Oralkan, Omer,
Khuri-Yakub, Butrus T |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Comparative Study
Journal Article
Research Support, N.I.H., Extramural
Research Support, U.S. Gov't, Non-P.H.S. |
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