Micro- and submicrostructuring thin polymer films with two and three-beam single pulse laser interference lithography
In this work we report the application of two and three-beam single pulse laser interference lithography to thin polymer films of poly(trimethylene terephthalate) (PTT). By irradiating the sample surface with temporary and spatially overlapped single pulses from two or three coherent beams and chang...
Ausführliche Beschreibung
Bibliographische Detailangaben
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 30(2014), 29 vom: 29. Juli, Seite 8973-9
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1. Verfasser: |
Martín-Fabiani, Ignacio
(VerfasserIn) |
Weitere Verfasser: |
Riedel, Stephen,
Rueda, Daniel R,
Siegel, Jan,
Boneberg, Johannes,
Ezquerra, Tiberio A,
Nogales, Aurora |
Format: | Online-Aufsatz
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Sprache: | English |
Veröffentlicht: |
2014
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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Schlagworte: | Journal Article |