Measurements of frequency fluctuations in aluminum nitride contour-mode resonators
As part of the current drive to engineer miniaturized monolithic high-performance microelectromechanical-enabled oscillators, there is a need for further study of frequency fluctuations in microelectromechanical resonators. To this end, we present the measurement of frequency fluctuations for 128 al...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 61(2014), 6 vom: 05. Juni, Seite 913-9
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| 1. Verfasser: |
Miller, Nicholas
(VerfasserIn) |
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| Weitere Verfasser: |
Piazza, Gianluca |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2014
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S. |
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