Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model
In this work, an approach has been developed to predict the location of large spurious modes in the resonant response of aluminum nitride (AlN) microelectromechanical systems (MEMS) resonators over a wide range of desired operating frequencies. This addresses significant challenges in the design of...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 61(2014), 5 vom: 16. Mai, Seite 729-38
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| 1. Verfasser: |
Branch, Darren W
(VerfasserIn) |
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| Weitere Verfasser: |
Wojciechowski, Kenneth E,
Olsson, Roy H 3rd |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2014
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S. |
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