Langasite surface acoustic wave sensors : fabrication and testing
We report on the development of harsh-environment surface acoustic wave sensors for wired and wireless operation. Surface acoustic wave devices with an interdigitated transducer emitter and multiple reflectors were fabricated on langasite substrates. Both wired and wireless temperature sensing was d...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 59(2012), 2 vom: 13. Feb., Seite 295-303
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| 1. Verfasser: |
Zheng, Peng
(VerfasserIn) |
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| Weitere Verfasser: |
Greve, David W,
Oppenheim, Irving J,
Chin, Tao-Lun,
Malone, Vanessa |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2012
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S. |
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