Characterization, optimization and surface physics aspects of in situ plasma mirror cleaning

Although the graphitic carbon contamination of synchrotron beamline optics has been an obvious problem for several decades, the basic mechanisms underlying the contamination process as well as the cleaning/remediation strategies are not understood and the corresponding cleaning procedures are still...

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Bibliographische Detailangaben
Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 21(2014), Pt 2 vom: 07. März, Seite 300-14
1. Verfasser: Pellegrin, Eric (VerfasserIn)
Weitere Verfasser: Sics, Igors, Reyes-Herrera, Juan, Perez Sempere, Carlos, Lopez Alcolea, Juan Josep, Langlois, Michel, Fernandez Rodriguez, Jose, Carlino, Vincent
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2014
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article X-ray photoemission spectroscopy carbon contamination interference microscopy low-pressure RF plasma optical emission spectroscopy synchrotron optics