Long-range ordered self-assembly of novel acrylamide-based diblock copolymers for nanolithography and metallic nanostructure fabrication

© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 26(2014), 18 vom: 07. Mai, Seite 2894-900
1. Verfasser: Lee, Je Gwon (VerfasserIn)
Weitere Verfasser: Jung, Yeon Sik, Han, Sung-Hwan, Kim, Kwan-Mook, Han, Yang-Kyoo
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2014
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article Research Support, Non-U.S. Gov't direct self-assembly metallic nanostructures nanolithography novel diblock copolymers
Beschreibung
Zusammenfassung:© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Novel acrylamide-based hard-soft hybrid block copolymers generate high-quality nanolithographic patterns satisfying high-resolution, long-range ordering, low defect density, moderate etch selectivity, and easy pattern transfer onto a substrate. The resulting patterns can also be used as a scaffold for metallic nanostructures such as aligned nanowires and nanomeshes with extraordinary structural regularity
Beschreibung:Date Completed 17.04.2015
Date Revised 30.09.2020
published: Print-Electronic
Citation Status PubMed-not-MEDLINE
ISSN:1521-4095
DOI:10.1002/adma.201305186