Long-range ordered self-assembly of novel acrylamide-based diblock copolymers for nanolithography and metallic nanostructure fabrication
© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Veröffentlicht in: | Advanced materials (Deerfield Beach, Fla.). - 1998. - 26(2014), 18 vom: 07. Mai, Seite 2894-900 |
---|---|
1. Verfasser: | |
Weitere Verfasser: | , , , |
Format: | Online-Aufsatz |
Sprache: | English |
Veröffentlicht: |
2014
|
Zugriff auf das übergeordnete Werk: | Advanced materials (Deerfield Beach, Fla.) |
Schlagworte: | Journal Article Research Support, Non-U.S. Gov't direct self-assembly metallic nanostructures nanolithography novel diblock copolymers |
Zusammenfassung: | © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Novel acrylamide-based hard-soft hybrid block copolymers generate high-quality nanolithographic patterns satisfying high-resolution, long-range ordering, low defect density, moderate etch selectivity, and easy pattern transfer onto a substrate. The resulting patterns can also be used as a scaffold for metallic nanostructures such as aligned nanowires and nanomeshes with extraordinary structural regularity |
---|---|
Beschreibung: | Date Completed 17.04.2015 Date Revised 30.09.2020 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
ISSN: | 1521-4095 |
DOI: | 10.1002/adma.201305186 |