Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering
An integration method is demonstrated for directly determining the average interface statistics of periodic multilayers from the X-ray scattering diagram. By measuring the X-ray scattering diagram in the out-of-plane geometry and integrating the scattered intensity along the vertical momentum transf...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 21(2014), Pt 1 vom: 15. Jan., Seite 97-103
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| 1. Verfasser: |
Li, Haochuan
(VerfasserIn) |
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| Weitere Verfasser: |
Zhu, Jingtao,
Wang, Zhanshan,
Chen, Hong,
Wang, Yuzhu,
Wang, Jie |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2014
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
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| Schlagworte: | Journal Article
X-ray scattering
dynamic scaling
interface morphology
multilayer
power spectral density |
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