Micromachining techniques in developing high-frequency piezoelectric composite ultrasonic array transducers
Several micromachining techniques for the fabrication of high-frequency piezoelectric composite ultrasonic array transducers are described in this paper. A variety of different techniques are used in patterning the active piezoelectric material, attaching backing material to the transducer, and asse...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 12 vom: 28. Dez., Seite 2615-25
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| 1. Verfasser: |
Liu, Changgeng
(VerfasserIn) |
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| Weitere Verfasser: |
Djuth, Frank T,
Zhou, Qifa,
Shung, K Kirk |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, N.I.H., Extramural |
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