Composition-dependent structure of polycrystalline magnetron-sputtered V-Al-C-N hard coatings studied by XRD, XPS, XANES and EXAFS

Composition-dependent structure of polycrystalline magnetron-sputtered V-Al-C-N hard coatings studied by XRD, XPS, XANES and EXAFS

V-Al-C-N hard coatings with high carbon content were deposited by reactive radio-frequency magnetron sputtering using an experimental combinatorial approach, deposition from a segmented sputter target. The composition-dependent coexisting phases within the coating were analysed using the complementa...

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Bibliographische Detailangaben
Veröffentlicht in:Journal of applied crystallography. - 1998. - 46(2013), Pt 4 vom: 01. Aug., Seite 1064-1075
1. Verfasser: Krause, Bärbel (VerfasserIn)
Weitere Verfasser: Darma, Susan, Kaufholz, Marthe, Mangold, Stefan, Doyle, Stephen, Ulrich, Sven, Leiste, Harald, Stüber, Michael, Baumbach, Tilo
Format: Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Journal of applied crystallography
Schlagworte:Journal Article X-ray absorption near-edge spectroscopy (XANES) X-ray photoelectron spectroscopy (XPS) amorphous carbon carbides extended X-ray absorption fine-structure spectroscopy (EXAFS) hard coatings metastable phases nitrides sputter deposition