Fabrication of three-dimensional nanostructured titania materials by prism holographic lithography and the sol-gel reaction

We present a simple, easy method for fabricating high-quality titania inverted replicas of 3D holographically featured structures. A combination of single-prism holographic lithography and sol-gel chemistry was used to prepare 3D titania inverse structures with flat and completely open surfaces with...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 29(2013), 31 vom: 06. Aug., Seite 9620-5
1. Verfasser: Park, Sung-Gyu (VerfasserIn)
Weitere Verfasser: Jeon, Tae Yoon, Yang, Seung-Man
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Gels Polymers titanium dioxide 15FIX9V2JP Titanium D1JT611TNE
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520 |a We present a simple, easy method for fabricating high-quality titania inverted replicas of 3D holographically featured structures. A combination of single-prism holographic lithography and sol-gel chemistry was used to prepare 3D titania inverse structures with flat and completely open surfaces without the use of additional postprocessing steps, such as reactive ion etching, ion-beam milling, and/or polishing steps. A hydrophobic, stable liquid titania precursor facilitated the complete infiltration of the precursor into the hydrophobic 3D SU-8 polymer template, which produced very uniform high-quality titania inverse structures. Although the degree of film shrinkage during the calcination process was large (∼34%), the optical strength of the 3D titania inverse photonic crystals doubled because of the high-refractive-index contrast. Compared to titania inverse opal structures, the filling fraction (∼27%) of titania materials has been doubled. This is the first work to fabricate titania inverse photonic crystals with a high filling fraction by utilizing prism holographic lithography and the sol-gel chemistry reaction of a stable titania precursor. The X-ray diffraction patterns indicated the presence of a crystalline anatase or rutile phase depending on the calcination temperature 
650 4 |a Journal Article 
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700 1 |a Jeon, Tae Yoon  |e verfasserin  |4 aut 
700 1 |a Yang, Seung-Man  |e verfasserin  |4 aut 
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