Template-stripped, ultraflat gold surfaces with coplanar, embedded titanium micropatterns
Ultraflat gold surfaces with coplanar, embedded titanium micropatterns, exhibiting extremely low roughness over the entire surface, have been obtained by a modified template-stripping procedure. Titanium is deposited onto photolithographically predefined regions of a silicon template. Following phot...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 29(2013), 31 vom: 06. Aug., Seite 9935-43 |
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| Weitere Verfasser: | , , , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article Gold 7440-57-5 Titanium D1JT611TNE |
| Zusammenfassung: | Ultraflat gold surfaces with coplanar, embedded titanium micropatterns, exhibiting extremely low roughness over the entire surface, have been obtained by a modified template-stripping procedure. Titanium is deposited onto photolithographically predefined regions of a silicon template. Following photoresist lift-off, the entire surface is backfilled with gold, template stripping is conducted, and an ultraflat micropatterned surface is revealed. Atomic force microscopy confirms a roughness of <0.5 nm RMS on both Ti and Au regions, with a topographically indistinguishable gold-titanium interface. Detailed surface-chemical maps of the patterned surfaces have been obtained by means of imaging X-ray photoelectron spectroscopy (i-XPS) as well as time-of-flight secondary-ion mass spectrometry (ToF-SIMS). They confirm the presence of well-separated Ti and Au regions, with a chemical contrast that is sharp (as determined by ToF-SIMS) and complete (as determined by i-XPS) across the Ti-Au interface. Thus, a surface has been fabricated that is physically homogeneous down to the nanoscale incorporating chemically distinct micropatterns consisting of two different metals, with totally contrasting surface chemistries |
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| Beschreibung: | Date Completed 25.02.2014 Date Revised 06.08.2013 published: Print-Electronic Citation Status MEDLINE |
| ISSN: | 1520-5827 |
| DOI: | 10.1021/la401364e |