Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling
Fresnel zone plates (FZPs) recently showed significant improvement by focusing soft X-rays down to ~10 nm. In contrast to soft X-rays, generally a very high aspect ratio FZP is needed for efficient focusing of hard X-rays. Therefore, FZPs had limited success in the hard X-ray range owing to difficul...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 20(2013), Pt 3 vom: 10. Mai, Seite 433-40
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| 1. Verfasser: |
Mayer, Marcel
(VerfasserIn) |
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| Weitere Verfasser: |
Keskinbora, Kahraman,
Grévent, Corinne,
Szeghalmi, Adriana,
Knez, Mato,
Weigand, Markus,
Snigirev, Anatoly,
Snigireva, Irina,
Schütz, Gisela |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
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| Schlagworte: | Journal Article
ALD
FIB
Fresnel zone plate
hard X-ray
multilayer
sputtered-sliced |
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