Lift-off protocols for thin films for use in EXAFS experiments

Lift-off protocols for thin films for improved extended X-ray absorption fine structure (EXAFS) measurements are presented. Using wet chemical etching of the substrate or the interlayer between the thin film and the substrate, stand-alone high-quality micrometer-thin films are obtained. Protocols fo...

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Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 20(2013), Pt 3 vom: 10. Mai, Seite 426-32
1. Verfasser: Decoster, S (VerfasserIn)
Weitere Verfasser: Glover, C J, Johannessen, B, Giulian, R, Sprouster, D J, Kluth, P, Araujo, L L, Hussain, Z S, Schnohr, C, Salama, H, Kremer, F, Temst, K, Vantomme, A, Ridgway, M C
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article Research Support, Non-U.S. Gov't EXAFS dielectric lift-off semiconductor thin film Membranes, Artificial Pancreatitis-Associated Proteins REG3A protein, human