Lift-off protocols for thin films for improved extended X-ray absorption fine structure (EXAFS) measurements are presented. Using wet chemical etching of the substrate or the interlayer between the thin film and the substrate, stand-alone high-quality micrometer-thin films are obtained. Protocols fo...
Bibliographische Detailangaben
Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 20(2013), Pt 3 vom: 10. Mai, Seite 426-32
|
1. Verfasser: |
Decoster, S
(VerfasserIn) |
Weitere Verfasser: |
Glover, C J,
Johannessen, B,
Giulian, R,
Sprouster, D J,
Kluth, P,
Araujo, L L,
Hussain, Z S,
Schnohr, C,
Salama, H,
Kremer, F,
Temst, K,
Vantomme, A,
Ridgway, M C |
Format: | Online-Aufsatz
|
Sprache: | English |
Veröffentlicht: |
2013
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Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
|
Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
EXAFS
dielectric
lift-off
semiconductor
thin film
Membranes, Artificial
Pancreatitis-Associated Proteins
REG3A protein, human |