Lateral-field-excited bulk acoustic wave sensors on langasite working on different operational modes
Lateral-field-excited (LFE) bulk acoustic wave sensors on langasite working on different operational modes are investigated and compared. Langasite LFE sensors on pure-LFE mode and pseudo-LFE mode are designed and fabricated. The sensitivities of the devices to changes in liquid electrical propertie...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 4 vom: 21. Apr., Seite 864-7
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| 1. Verfasser: |
Ma, Tingfeng
(VerfasserIn) |
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| Weitere Verfasser: |
Wang, Ji,
Du, Jianke,
Yuan, Lili,
Qian, Zhenghua,
Zhang, Zhitian,
Zhang, Chao |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Letter
Research Support, Non-U.S. Gov't |
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