Langasite surface acoustic wave gas sensors : modeling and verification

We report finite element simulations of the effect of conductive sensing layers on the surface wave velocity of langasite substrates. The simulations include both the mechanical and electrical influences of the conducting sensing layer. We show that three-dimensional simulations are necessary becaus...

Ausführliche Beschreibung

Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 3 vom: 01. März, Seite 579-86
1. Verfasser: Zheng, Peng (VerfasserIn)
Weitere Verfasser: Greve, David W, Oppenheim, Irving J
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, U.S. Gov't, Non-P.H.S.