Tunability of aluminum nitride acoustic resonators : a phenomenological approach
A phenomenological approach is developed to identify the physical parameters causing the dc-voltage-induced tunability of aluminum nitride (AlN) acoustic resonators, widely used for RF filters. The typical resonance frequency of these resonators varies from 2.038 GHz at -200 V to 2.062 GHz at +200 V...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 12 vom: 26. Dez., Seite 2516-20
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| 1. Verfasser: |
Defay, Emmanuel
(VerfasserIn) |
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| Weitere Verfasser: |
Ben Hassine, Nizar,
Emery, Patrick,
Parat, Guy,
Abergel, Julie,
Devos, Arnaud |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2011
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Aluminum Compounds
aluminum nitride
7K47D7P3M0 |
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