Diamond-based capacitive micromachined ultrasonic transducers in immersion
Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time....
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 2 vom: 13. Feb., Seite 414-20 |
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| Format: | Article en ligne |
| Langue: | English |
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2013
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Sujets: | Journal Article |
| Accès en ligne |
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