Large-area fabrication of periodic sub-15 nm-width single-layer graphene nanorings

Large-area fabrication of periodic sub-15 nm-width single-layer graphene nanorings

Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 25(2013), 2 vom: 11. Jan., Seite 199-204
1. Verfasser: Pak, Yusin (VerfasserIn)
Weitere Verfasser: Jeong, Huisu, Lee, Kwang-Ho, Song, Hui, Kwon, Taehyeon, Park, Jungsu, Park, Woojin, Jeong, Mun-Seok, Lee, Takhee, Seo, Sunae, Jung, Gun-Young
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Graphite 7782-42-5
Beschreibung
Zusammenfassung:Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
A periodically aligned array of graphene nanorings (GRNRs) with a sub-15 nm linewidth at a pitch of 450 nm is fabricated with a large area, 9 cm(2) , through conventional nanoimprint lithography coupled with sophisticated metal deposition and plasma-etching processes. The existence of the single-layer GRNRs is verified by various techniques
Beschreibung:Date Completed 27.09.2013
Date Revised 30.09.2020
published: Print-Electronic
Citation Status MEDLINE
ISSN:1521-4095
DOI:10.1002/adma.201202626