Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates
(1120) ZnO films with the c-axis lying in the plane deposited on R-sapphire substrates by RF magnetron sputtering are studied. The focusing investigation is the effect of substrate positions in the sputtering on structural and acoustic characteristics of the ZnO films. The crystallographic character...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 59(2012), 8 vom: 24. Aug., Seite 1613-7
|
|---|
| 1. Verfasser: |
Wang, Yan
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Wasa, Kiyotaka,
Zhang, Shu-yi |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2012
|
|---|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Schlagworte: | Letter
Research Support, Non-U.S. Gov't |
|---|