Thermal-mechanical-noise-based CMUT characterization and sensing

When capacitive micromachined ultrasonic transducers (CMUTs) are monolithically integrated with custom-designed low-noise electronics, the output noise of the system can be dominated by the CMUT thermal-mechanical noise both in air and in immersion even for devices with low capacitance. Because the...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 59(2012), 6 vom: 15. Juni, Seite 1267-75
1. Verfasser: Gurun, Gokce (VerfasserIn)
Weitere Verfasser: Hochman, Michael, Hasler, Paul, Degertekin, F Levent
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2012
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, N.I.H., Extramural