Flexible control of block copolymer directed self-assembly using small, topographical templates potential lithography solution for integrated circuit contact hole patterning

Flexible control of block copolymer directed self-assembly using small, topographical templates : potential lithography solution for integrated circuit contact hole patterning

Détails bibliographiques
Publié dans:Advanced materials (Deerfield Beach, Fla.). - 1998. - 24(2012), 23 vom: 19. Juni, Seite 3107-14, 3082
Auteur principal: Yi, He (Auteur)
Autres auteurs: Bao, Xin-Yu, Zhang, Jie, Bencher, Christopher, Chang, Li-Wen, Chen, Xiangyu, Tiberio, Richard, Conway, James, Dai, Huixiong, Chen, Yongmei, Mitra, Subhasish, Wong, H-S Philip
Format: Article en ligne
Langue:English
Publié: 2012
Accès à la collection:Advanced materials (Deerfield Beach, Fla.)
Sujets:Journal Article Research Support, Non-U.S. Gov't Research Support, U.S. Gov't, Non-P.H.S. Methacrylates Polymers Polystyrenes polystyrene-block-poly(methyl methacrylate)
Description
Description:Date Completed 01.10.2012
Date Revised 30.09.2020
published: Print-Electronic
Citation Status MEDLINE
ISSN:1521-4095
DOI:10.1002/adma.201200265