High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors
This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators operating in the gigahertz frequency range. The films are grown by sputtering a metallic tantalum target unde...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 59(2012), 3 vom: 21. März, Seite 366-72
|
|---|
| 1. Verfasser: |
Capilla, Jose
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Olivares, Jimena,
Clement, Marta,
Sangrador, Jesús,
Iborra, Enrique,
Devos, Arnaud |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2012
|
|---|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
|---|